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Part 3: Test Structures, Test Chips, Inline Metrology & Inspection Michael C. Saying CTO, Mayan Technology Center Applied Materials, Inc. Mike Saying mat. Comics Introduction to Test Chips Test Structures
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Part 3 test structures are a set of standardized testing procedures and protocols used to evaluate the performance of a system or component.
Any entity or individual responsible for conducting or overseeing testing activities may be required to file part 3 test structures.
Part 3 test structures can be filled out by following the instructions provided in the testing guidelines or protocols.
The purpose of part 3 test structures is to ensure consistency and accuracy in testing procedures and results.
Part 3 test structures must include details about the testing methodology, parameters, results, and any deviations from the expected outcomes.
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