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Standard Operating ProceduresLaboratory Specific Chemical: Nitrogen trifluoride Please fill out the form completely. Print a copy and insert into your Laboratory Safety Manual and Chemical Hygiene
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Who needs chemical nitrogen trifluoride?

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Chemical nitrogen trifluoride is commonly used in various industries and applications, including:
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- Semiconductor manufacturing: Nitrogen trifluoride is used as a cleaning agent for removing contaminants from semiconductor surfaces during the fabrication process.
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- Flat panel display production: It is utilized in the manufacturing of LCD and OLED displays for cleaning and etching purposes.
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- Solar panel manufacturing: Nitrogen trifluoride can be employed in the production of solar cells and panels.
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- Electronics industry: It finds use in the production of electronic components and devices.
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- Research and development: Nitrogen trifluoride is also utilized in scientific research and development for various experiments and processes.
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These are just a few examples, and the specific applications may vary depending on the industry and specific needs.

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Chemical nitrogen trifluoride is a highly reactive and toxic gas used in the electronics industry for cleaning and etching purposes.
Any facility that manufactures, imports, processes, or uses chemical nitrogen trifluoride in quantities above the reporting threshold set by regulatory authorities.
To fill out chemical nitrogen trifluoride, facilities need to provide information on the quantities stored, used, released, and transferred off-site, as well as any waste management activities related to the chemical.
The purpose of chemical nitrogen trifluoride is to be used as a cleaning agent, etchant, and plasma source in the electronics industry.
Facilities must report the quantities of chemical nitrogen trifluoride on-site, off-site transfers, waste management activities, and release amounts to the environment.
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