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C 2011 Ethan Ritz CHARGING IN ASPECT RATIO DEPENDENT ETCHING BY ETHAN RITZ THESIS Submitted in partial fulfillment of the requirements for the degree of Master of Science in Nuclear Engineering in
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Related Links

Charging in Aspect Ratio Dependent Etching - IDEALS - University ...
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by E Ritz · 2014 · Cited by 7 — Eithan Ritz, Yui Lun Wu ⁎, Jungmi Hong, Daniel Andruczyk, Tae S ... University of Illinois at Urbana — Champaign, Urbana, IL 61801, USA.

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