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Revision Date 27Sep2013, Issuing Date 05Mar2010, Page 1 / 9 NITROGEN TRIFLUORIDE Material Safety Data Sheet 1. PRODUCT AND COMPANY IDENTIFICATION Product Name NITROGEN TRIFLUORIDE Product Code(s)
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01
Make sure you are in a well-ventilated area or fume hood, as nitrogen trifluoride can be hazardous if inhaled.
02
Put on appropriate personal protective equipment, such as gloves and goggles, to ensure your safety.
03
Obtain a container suitable for holding nitrogen trifluoride, such as a glass bottle or stainless steel cylinder.
04
Check the container for any signs of damage or leaks. If you notice any, do not use the container and inform the appropriate authorities.
05
Connect the container to a suitable pressure regulator or valve designed for handling nitrogen trifluoride.
06
Slowly open the valve or regulator to allow nitrogen trifluoride to flow into the container. Be cautious not to exceed the container's maximum capacity.
07
Once the container is filled to the desired level, close the valve or regulator to stop the flow of nitrogen trifluoride.
08
Carefully disconnect the container from the regulator or valve system. Securely cap or seal the container to prevent leaks.
09
Store the container in a cool, dry place away from ignition sources and incompatible materials.

Who needs nitrogen trifluoride?

01
Industries involved in the production of semiconductors often require nitrogen trifluoride for cleaning and etching purposes.
02
Research laboratories engaged in the study of advanced materials and microelectronics may utilize nitrogen trifluoride.
03
Manufacturers of flat-panel displays, solar panels, and other electronic devices may use nitrogen trifluoride in their production processes.
04
Chemical companies and refineries may use nitrogen trifluoride as a raw material or reagent in various chemical reactions.
05
Some specialized cleaning services may utilize nitrogen trifluoride for removing contaminants from certain surfaces or equipment.
Note: Handling nitrogen trifluoride should be performed by trained professionals following proper safety protocols and in accordance with relevant regulations.
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Nitrogen trifluoride is a chemical compound composed of nitrogen and fluorine atoms.
Companies or individuals who produce, import, or use nitrogen trifluoride are typically required to file it.
Nitrogen trifluoride can be filled out by providing information on the production, import, and use of the compound.
Nitrogen trifluoride is commonly used in the electronics industry for cleaning equipment and as a plasma etchant.
Information such as the quantity produced, imported, and used, as well as any emissions or releases of nitrogen trifluoride must be reported.
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