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Данная магистерская диссертация посвящена исследованию физико-механических свойств алмазных покрытий, синтезированных в реакторе HFCVD с разными концентрациями метана. Работа включает в себя обзор литературы, методологию синтеза алмазных пленок, оценку их механических свойств, а также исследование трибологических характеристик. Исследование подчеркивает потенциал использования алмазных покрытий в различных отраслях, включая микроэлектронику и инструменты резки.
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