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This paper presents the concept and some preliminary experimental data on a new method for measuring critical dimensions on masks used for x-ray lithography. The method uses a scanning electron microscope
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What is nistir 89-4047?
NISTIR 89-4047 is a technical report published by the National Institute of Standards and Technology (NIST) that provides guidelines and recommendations for the interoperability of biometric systems.
Who is required to file nistir 89-4047?
Organizations and entities involved in biometric technology development, implementation, or research may be required to file NISTIR 89-4047, particularly if they are seeking compliance with NIST standards.
How to fill out nistir 89-4047?
To fill out NISTIR 89-4047, one must carefully follow the guidelines outlined in the document, providing detailed information about biometric system specifications, performance metrics, and interoperability aspects as required.
What is the purpose of nistir 89-4047?
The purpose of NISTIR 89-4047 is to promote the interoperability of biometric systems across various applications, ensuring reliability, security, and effectiveness in the use of biometric technologies.
What information must be reported on nistir 89-4047?
Information that must be reported on NISTIR 89-4047 includes system architecture, performance testing results, integration capabilities, and compliance with specified standards in biometric technologies.
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