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Part processing to be undertaken at OWN (e.g. only electron beam lithography or dry etch)?, Yes / No. Number of wafers to be supplied: Whole wafer or part wafer processing? If part wafer, please state
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E-beam lithography job request is a formal request to use electron beam technology for creating patterns on a substrate.
Researchers or companies that require the use of e-beam lithography for their projects are required to file the job request.
The job request can be filled out by providing information such as project details, desired patterns, substrate material, and any specific requirements.
The purpose of the job request is to request the use of e-beam lithography services for creating high-resolution patterns on a substrate.
The job request must include project details, desired patterns, substrate material, required resolution, and any specific requirements.
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