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Nmb 0 for i 1 to n-1 This corresponds to a Wafer being moved from Ck into C x if Ek i 1 and Ek i 1 0 then nmb nmb 1 FIG. 6kil1lustrates all possible schedules available i.e. tWo nmb nmb uk n 1 Ek 1 mod 2 return nmb schedules in a 2-chamber serial trace. C is associated 25 according to rules s1 s2 and s3 stated above. In accor With an n-tuple from the alphabet 0 1. 427/167 SEMICgNDUCTOR WAFER PROCESSING 5 654 903 5 855 681 A 8/1997 1/1999 Maydan Reitman et CI a1. DETAILED DESCRIPTION Note...
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